http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2001100403-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_129e393582e6bdf4029baf2206522f45 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-033 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 1999-09-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_931bd210e56989f760258b3cd98516d4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ab0ae7f9444364c55cb2ead4e1dfd749 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_11831bd41ce6110ea0adcd055e62ca0b |
| publicationDate | 2001-04-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2001100403-A |
| titleOfInvention | Positive radiation-sensitive composition and method for producing resist pattern using the same |
| abstract | (57) [Summary] (with correction) [PROBLEMS] To provide a high-sensitivity, positive-type radiation-sensitive composition having a resolution capable of processing a sub-quarter micron pattern. A positive-type radiation-sensitive composition comprising a polymer containing a structural unit represented by the following general formula (1) and an acid generator that generates an acid upon irradiation with radiation. (X represents a halogen atom or a cyano group. R represents an acid-decomposable organic group, and contains at least one structure represented by the following general formula (2).) (Wherein R 1 and R 2 each independently represent an alkyl group, an aryl group, an arylalkyl group, an alkoxyalkyl group, an alkoxyaryl group, an alkoxyarylalkyl group, a hydroxyalkyl group, a hydroxyaryl group, a hydroxyarylalkyl group, etc. R 1 and R 2 may be closed to form a ring structure; R 3 represents an organic group having 1 to 12 carbon atoms; m is 0 or 1) |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I406094-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7352132-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7858288-B2 |
| priorityDate | 1999-09-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 281.