http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2001100401-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_be92719b856db86c092cc233e9512ca2 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| filingDate | 1999-09-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bb2a9a4ad2ac82e30a6d3af4c009da9b |
| publicationDate | 2001-04-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2001100401-A |
| titleOfInvention | Photosensitive composition and method for forming fine shapes on substrate |
| abstract | (57) [Problem] To provide a fine shape on a substrate surface which cannot be formed with high precision by a conventional fine shape creation method, for example, to provide an aspheric lens array with a device surface which is smooth enough to cause no optical problem. Provided is a photosensitive composition that can be prepared with high precision and a method for forming a fine shape using the same. SOLUTION: A light having a wavelength λ is contained in a liquid-phase photosensitive composition (C) having a refractive index nc with respect to light having an irradiation light wavelength (hereinafter also referred to as a wavelength λ) irradiated for photosensitization. A photosensitive composition composed of dispersed and mixed fine particles of a solid phase of the light-scattering composition (A) having a small attenuation rate κa, and a method for forming a fine shape using the same. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7470485-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2006100126-A3 |
| priorityDate | 1999-09-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 79.