http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2001091545-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_80787665b837ed3eb503bbcd27c0043a |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-073 |
| filingDate | 1999-09-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7fc22460b454d59e98fda08955c82c48 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_def155bbc08baf703d6c86fe7b53bba6 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e236c23d83ba5709c301dc272d8bd750 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_491291cd70b598a17223f1e2801ab080 |
| publicationDate | 2001-04-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2001091545-A |
| titleOfInvention | Semiconductor inspection equipment |
| abstract | (57) Abstract: An object of the present invention is to provide an inspection apparatus capable of performing a wide range of inspections from low-speed operation to high-speed operation in electrical characteristic inspection of a semiconductor element or a semiconductor device. A first metal film for improving adhesion to a substrate, a second metal film for preventing diffusion, a low-resistance third metal film, and a fourth metal film for protection are formed. By doing so, a wiring and an external connection electrode having low resistance and low capacitance can be achieved. Further, the life of the probe 2 that contacts the semiconductor element and the semiconductor device and the external connection electrode 4 that contacts the pin of the inspection system can be extended. |
| priorityDate | 1999-09-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24261 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457707758 |
Total number of triples: 17.