http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2001066347-A
Outgoing Links
Predicate | Object |
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assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_02685f435ae35c3a5eb2ea82515b8eed |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-28 |
filingDate | 1999-08-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_46431342ea12f3e67ae60be1570bd29c |
publicationDate | 2001-03-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-2001066347-A |
titleOfInvention | Semiconductor test apparatus, method of controlling external equipment in semiconductor test apparatus, and storage medium storing control program for the same |
abstract | (57) [Summary] An object of the present invention is to provide a semiconductor test apparatus capable of reducing the time required for testing a semiconductor device. An object of the present invention is to provide a method of controlling an external device in a semiconductor test apparatus and a storage medium storing a control program for the method. According to an input instruction from an input unit, a CPU defines an external device information request as a command for simultaneously requesting an external device information request and an external device information request. Is set in the command definition table 25a. Then, by transmitting the external device information request B ′ to the external device 4 via the I / F unit 24, the external device 4 simultaneously transmits the external device setting information corresponding to the external device information request B and the external device information request C. get. |
priorityDate | 1999-08-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 16.