http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2001060499-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_94b8a616160d18d90a44bac084da143b |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23G5-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J19-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-24 |
| filingDate | 1999-08-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f7b25862f5f63d4a696ff1218d87abf5 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cf4b8ca9d92609d90be5afda61cd93dc |
| publicationDate | 2001-03-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2001060499-A |
| titleOfInvention | Swirling type atmospheric pressure plasma processing system |
| abstract | (57) [Summary] [PROBLEMS] To effectively and chemically utilize neutrally excited neutral species without causing damage by ions or electrons, and to efficiently and efficiently save the surface of an object to be treated. Power, In order to be economically advantageous with a small amount of gas, the entire surface can be uniformly treated. SOLUTION: A flat plate-shaped high-voltage electrode 1 and a ground electrode 6 using punched metal are arranged to face each other with an insulator 5 interposed therebetween to form a discharge portion 4 formed by a minute gap between the electrodes 1 and 6. By supplying the mixed reaction gas to the portion 4 through a plurality of slit-shaped gas supply holes 14A formed in the outer peripheral portions of the electrodes 1 and 6 so that a swirling flow is formed, the glow generated by the application of the high-frequency voltage The mixed reaction gas is excited and decomposed by the discharge plasma to generate a gas flow containing a chemically active neutral excited species, and this gas flow is passed through a large number of gas flow ejection holes 3. It is configured to irradiate the surface of the object to be treated which is disposed facing the outside. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2017204492-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010536131-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2003080059-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109504970-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015062179-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20030018121-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013004405-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2003197397-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101805740-B1 |
| priorityDate | 1999-08-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 30.