http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2001053124-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3cfa11ef6f0c5577b4612b415ff30253 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N1-36 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N1-22 |
| filingDate | 1999-08-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_66de68d17f288f21d17b38f506cbbd17 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aae3e4f891724a28ce1c1496a0221926 |
| publicationDate | 2001-02-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2001053124-A |
| titleOfInvention | Analytical sample collecting instrument for semiconductor steam generator and analytical processing method using the instrument |
| abstract | PROBLEM TO BE SOLVED: To provide an analytical sample collection instrument of a semiconductor steam generator capable of collecting high-temperature steam as a condensate with the same composition without using a trapping solution such as pure water, and a device using the same. SOLUTION: It is an object of the present invention to provide an analytical processing method, which is connected to an external combustion type steam generating apparatus for a semiconductor manufacturing process, and for analyzing trace impurities contained in steam generated by the apparatus. In the analytical sample collecting instrument of the generator, the analytical sample collecting instrument is provided with a receiver 1 for condensing and storing water vapor to be collected. A cover 2 to which a steam introduction pipe 4 is attached and which is removably fitted to the receiver 1, and a refrigerant bath 3 for cooling the receiver 1 equipped with the cover 2 from the outside. The introduction pipe 4 extends downward inside the receiver when the lid is attached, and its end is arranged close to the bottom surface of the receiver. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010002193-A |
| priorityDate | 1999-08-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 20.