http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2001052994-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_12d24c0a12c3ecdb6d9a47d623d96e76 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-38 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-075 |
| filingDate | 1999-08-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eb161e61ce3d2e6ab58d26a81ef56f09 |
| publicationDate | 2001-02-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2001052994-A |
| titleOfInvention | Method for manufacturing semiconductor device |
| abstract | (57) [Abstract] (with correction) [PROBLEMS] To provide a method of manufacturing a semiconductor device which can reduce the adhesion between polyimide and a resist and prevent intermixing. SOLUTION: A polyimide 2 is coated on a silicon wafer 1 and cured, and isopropyl alcohol and water are mixed at a ratio of 1: 1. An aqueous solution in which 1% of γ-methacryloxypropyltrimethoxysilane is dissolved is dissolved in this solution. It was prepared as a coupling agent 3, and this aqueous solution was mixed with polyimide 2 Is immersed for 10 minutes, then the silicon wafer is taken out, washed with isopropyl alcohol, and air-dried, and then the resist 4 is coated on the silicon wafer 1 coated with the silane coupling agent 3. And patterning. By applying the silane coupling agent 3, the adhesion between the resist 4 and the polyimide 2 is reduced, and the resist residue is prevented. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-100456422-C http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7670747-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101583876-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2005106931-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100953372-B1 |
| priorityDate | 1999-08-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 39.