| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fcc0b66123940d1b32783569ebfa2d45 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-073
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01R11-01
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 |
| filingDate |
1999-08-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ddb8d7d6d5798b39bd99fdcc015addf6 |
| publicationDate |
2001-02-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2001050983-A |
| titleOfInvention |
Probe card |
| abstract |
PROBLEM TO BE SOLVED: To provide a probe card capable of reliably achieving required electrical connection even to a circuit device having an oxide film on the surface of an electrode to be inspected. Provided is a probe card capable of preventing a surface of a circuit device from being damaged or contaminated, and maintaining a good electrical connection state for a long period of time. A probe card interposed between a circuit device to be tested and an electrical testing device for performing electrical testing of electrodes of the circuit device, wherein an elastic polymer material is filled with conductive particles. A plurality of conductive portions extending in the thickness direction are electrically insulated from each other by an anisotropic conductive sheet disposed in a state where the conductive portions are insulated from each other by an insulating portion made of an elastic polymer material. A plurality of protruding electrodes that are electrically connected, and the anisotropic conductive sheet and the protruding electrodes are integrated. Each of the protruding electrodes is preferably supported by a support plate disposed on the anisotropic conductive sheet. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8129253-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7190184-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005265750-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2006043631-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7601281-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8039277-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2003059611-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7309244-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-03017335-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009098065-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7662650-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7700379-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2004112195-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2008156162-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-0215260-A1 |
| priorityDate |
1999-08-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |