http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2001049176-A
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fcc0b66123940d1b32783569ebfa2d45 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D183-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316 |
filingDate | 1999-06-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_14e72452304c1b9b5685afc273d05e8b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9d1c294a98f93161b5852e8b601c0f25 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f07e51afdf7d05bd6286bcdce8196bfd |
publicationDate | 2001-02-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-2001049176-A |
titleOfInvention | Film forming composition, film forming method, and low density film |
abstract | PROBLEM TO BE SOLVED: To provide a film forming composition which is useful as an interlayer insulating film in a semiconductor element or the like and which can obtain a low-density film having excellent dielectric constant characteristics and excellent CMP resistance. SOLUTION: R 2 R 3 Si (OR 1 ) 2 , R 2 Si At least one selected from the group consisting of (OR 1 ) 3 and Si (OR 1 ) 4 , and R 2 s (R 1 O) 3 -s SiRSi (OR 1 ) 3-t R 2 t (R 1 to R 3 may be the same or different, each represents a monovalent organic group, R represents a divalent organic group, and s and t represent 0 to 1 A silane compound, a hydrolyzate thereof and / or a condensate thereof, and (B) at least one selected from the group consisting of polyethers, polyesters, polycarbonates, polyanhydrides, and (meth) acrylic polymers. One organic polymer, and (C) an alcohol-based solvent, a ketone-based solvent, A film-forming composition comprising at least one solvent selected from the group consisting of an amide solvent and an ester solvent. |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005516391-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2002289607-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-03066750-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2003253205-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2003253204-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2003253206-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2006011512-A1 |
priorityDate | 1999-06-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 868.