http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2001048699-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1010e3862914acdd087e73d76911ec6d |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B29-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J19-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B33-021 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-208 |
| filingDate | 1999-08-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8a895442e579a032ee292224fca6de2c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2267ee5b1a4509a69d92718cc9f6e8e9 |
| publicationDate | 2001-02-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2001048699-A |
| titleOfInvention | Manufacturing method of silicon crystal nanosphere chain |
| abstract | (57) [Summary] [PROBLEMS] To develop a highly efficient and well-controlled generation method of a silicon crystal nanosphere chain. SOLUTION: A metal serving as a catalyst is heated and melted in an atmosphere containing an oxygen element as an oxidation source of silicon, and gas molecules of silicon are brought into contact with molten particles of the metal serving as a catalyst, thereby forming a gas-liquid-solid phase. In the method for producing a silicon crystal whisker by the (VLS) mechanism, a metal serving as a catalyst and / or an additive element which forms a solid solution with silicon coexist in an atmosphere for producing silicon gas molecules. The silicon crystal nanospheres covered with the SiO 2 oxide film formed by the simultaneous oxidation of silicon generate whisker-like chains arranged at substantially equal intervals by the neck of the SiO 2 oxide film. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2004331480-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015138716-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8715855-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2001206800-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011178585-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20030059936-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4615657-B2 |
| priorityDate | 1999-08-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 29.