http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2001048543-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_664f5b543543aac4cf0153a4ef4e0f85 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01P2006-80 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01G41-04 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01G41-04 |
| filingDate | 2000-07-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_374da668e517a0d583e899da39d948dd http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9df1645e091380bcbc96c986b071450b |
| publicationDate | 2001-02-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2001048543-A |
| titleOfInvention | Method for making UHP tungsten hexafluoride |
| abstract | PROBLEM TO BE SOLVED: To produce UHP (ultra high purity) grade tungsten hexafluoride by a purification process. A) separating an amount of crude tungsten hexafluoride into volatile impurities containing an amount of tungsten hexafluoride and an amount of non-volatile metal impurities introduced into an evaporation process; b ) Separating volatile impurities containing said amount of tungsten hexafluoride into an amount of semi-crude tungsten hexafluoride and an amount of non-volatile hydrogen fluoride residue by passing through a gas phase adsorption process; c) Separate the amount of semi-crude tungsten hexafluoride through a sparging system using UHP helium to separate the non-volatile UHP tungsten hexafluoride product. |
| priorityDate | 1999-07-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 33.