http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2001042530-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e415f6f1eeb8706d299ea086326248bf |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L25-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F2-46 |
| filingDate | 1999-07-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6bc7adeed5239f83d74d186e83cd0732 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3efed5c081e1666b42eb2384163b143f |
| publicationDate | 2001-02-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2001042530-A |
| titleOfInvention | Positive radiation-sensitive resin composition |
| abstract | (57) [Problem] To provide a positive-type radiation-sensitive resin composition which does not impair performance such as sensitivity and depth of focus even when a fine design rule such as super-resolution technology is applied. SOLUTION: (A) A resin in which at least a part of the hydroxyl group of an alkali-soluble polymer having a phenolic hydroxyl group is protected by an acid-decomposable protecting group, and (B) a radiation-sensitive compound which generates an acid by the action of radiation Wherein the resin (A) has a molar extinction coefficient at a wavelength of 248 nm of 500 to 2,000, and the radiation-sensitive compound (B) has a molar extinction coefficient of 1 at a wavelength of 248 nm. A positive radiation-sensitive resin composition having a molecular weight of 0000 to 30,000. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015180782-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2005101129-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007052193-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4991074-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2005101129-A1 |
| priorityDate | 1999-07-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 177.