http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2001033987-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_88fbcd2a70a3c49d0aed69a000d55909 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J11-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J11-36 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J11-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J9-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-40 |
| filingDate | 1999-07-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_42c6164867b3bdc8768e2762b793c831 |
| publicationDate | 2001-02-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2001033987-A |
| titleOfInvention | Pattern formation method |
| abstract | (57) [Problem] To provide a pattern forming method with good pattern formability using a ceramic material. SOLUTION: After forming a photosensitive resin composition layer on a substrate, exposure and development are performed through a pattern mask to form a concavo-convex resist pattern on the substrate, and an average particle diameter of 5 μm or less on the surface. After the powder is adhered, the concave portions of the resist pattern are filled with a ceramic material-containing paste, and then the resist pattern and the ceramic material-containing paste are baked, or the resist pattern is removed with a chemical, and then the ceramic material is removed. A pattern forming method of firing the containing paste. |
| priorityDate | 1999-07-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 155.