| abstract |
PROBLEM TO BE SOLVED: To provide a functional thin film having a uniform thickness and composition by modifying a surface layer composition of an object to be coated with a sublimable substance interacting therewith. SOLUTION: A sublimable substance 2 which interacts with a surface layer composition 1 of an object to be coated is placed in a closed space, and further in this space, the sublimable substance 2 is brought into a saturated sublimation pressure state, Sublimable substance 2 vapor is attached to the surface layer composition 1 on the surface of the object to be coated, and the attached sublimable substance 2 Is further permeated and dispersed from the surface of the surface layer composition 1 into the surface layer to interact with the surface layer composition 1. |