| abstract |
PROBLEM TO BE SOLVED: To provide a polymer which gives excellent results in performance such as resolution and profile when used as a resin component of a resist composition. Provided is a resist composition having characteristics. SOLUTION: The following formula (I) (Wherein, R 1 , R 2 and R 3 independently represent alkyl having 1 to 4 carbon atoms which may be substituted, or R 1 and R 2 , R 1 and R 3 or R 2 and R 3 3 is bonded to form an optionally substituted alkylene having 2 to 9 carbon atoms, or R 2 is methylidine, and one bond of methylidine is bonded to R 1 and another bond Hand is R 3 independently form an alkylene having 2 to 9 carbon atoms which may be substituted), and a polymer having an O-substituted vinylphenol unit represented by the formula A resist composition is provided. |