| abstract |
(57) [Problem] In a conventional minority carrier lifetime measuring device using a microwave photoconductive decay method, a metal waveguide used for microwave propagation is arranged near a wafer surface. In addition, it is difficult to arrange an optical system for imaging a position to be irradiated with microwaves, and it is difficult to set a measurement position. SOLUTION: The present invention uses a probe light having a predetermined wavelength as an electromagnetic wave for measurement, and focuses an imaging means on a condensing position of excitation light and probe light condensed at the same position by a measuring optical system. By doing so, the user can easily confirm the desired measurement position on the semiconductor wafer while observing the surface of the semiconductor wafer. |