| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_28c5b8cd65d70d39b7ed1e30c271a218 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K101-36 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K26-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-035
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-01
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J2-47
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-377
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B6-125
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B6-122
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J2-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B6-12 |
| filingDate |
1999-06-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_96fb59b1c5670b0aeca9c59e589dc449
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8880736aa49709fed8c069de3e5b8b0b |
| publicationDate |
2001-01-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2001007002-A |
| titleOfInvention |
Laser beam drawing equipment |
| abstract |
PROBLEM TO BE SOLVED: To provide a light-weight and small-sized laser beam drawing apparatus which is easy to assemble. A laser beam drawing apparatus generally includes a light source for processing a surface of an object to be drawn with a laser beam. It has an optical system for adjusting the intensity modulation of the laser beam and a control system for focusing the laser beam on the surface of the object to be drawn. I do. Since the optical system in the optical head is constituted by an optical waveguide having a predetermined pattern formed on the substrate 12, the optical head becomes a lightweight and compact optical head, and its movement and control in the Z direction becomes easy. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011071351-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10737976-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2021517656-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9423566-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9790128-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7324916-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7165734-B2 |
| priorityDate |
1999-06-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |