| abstract |
[PROBLEMS] To improve the exposure latitude of a negative pattern forming material, As a result, the precision of the fine processing is improved, and a high-resolution pattern appears. A pattern latent image forming portion formed by irradiation with radiation is changed in solubility in an alkaline aqueous solution, When all of the coating film in the non-irradiated portion is dissolved by performing the developing treatment, the residual film ratio of the radiation-irradiated portion becomes 70% of the coating film thickness. % Or more, and the residual film ratio when the residual film is immersed in a 50% methanol aqueous solution is 50% or more. |