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http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-403
filingDate 1997-04-08-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2000-12-26-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2000517413-A
titleOfInvention Manufacturing method of microelectrode array
abstract (57) Abstract: A method of fabricating a microelectrode array on an electrically insulated upper surface of a substrate comprises the following sequence of steps. A thin layer of metal or metal alloy is deposited by laser ablation on the upper surface of the substrate and through openings in the mask provided on the upper surface. Next, the microelectrode array is exposed by removing the mask from the upper surface. The method according to the invention is advantageous in that it allows microelectrodes made of any metal of inert metals and metal alloys to be manufactured and arranged in a precise design.
priorityDate 1996-04-11-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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