| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-02881
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-0427
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-02827
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-0426 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-2418
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-1702
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-0681
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-59 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B82B1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N29-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-17
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-59 |
| filingDate |
1996-12-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2000-11-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2000515624-A |
| titleOfInvention |
Improved light stress generator and detector |
| abstract |
(57) [Abstract] A system for investigating characteristics of a thin film and an interface between the thin films by measuring mechanical and thermal characteristics. In the system, light from the laser (136) is absorbed by a thin film or a structure made of a plurality of thin films, and changes in light transmission or reflection are measured and analyzed using an analyzer (134). Is done. Changes in reflection and transmission are used to provide information about the ultrasound waves generated by the structure. Information obtained from the use of the measurement method and apparatus of the present invention includes: (a) measurement of thin film thickness with improved speed and accuracy compared to earlier methods; (b) thermal and elastic properties of thin films. , Measurement of optical properties, (c) measurement of stress in the thin film, and (d) investigation of the properties of the interface, including the presence of roughness and defects. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4700680-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2002031591-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007527538-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101120534-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2008066090-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7961379-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008139028-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008516229-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007279060-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20030027833-A |
| priorityDate |
1996-01-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |