| abstract |
(57) Abstract Multilayer materials have an amorphous or polycrystalline layer, a tissue buffer layer and a directed thin layer. Furthermore, at least one cover layer is included between the buffer layer and the thin layer. In a method for producing a multi-layer material, the buffer layer is formed by using a buffer layer material delivery device at an angle α 1 ≠ 0 with respect to a vertical line of the substrate surface before the directed thin layer is deposited. It is applied on a substrate by depositing a buffer layer material on the surface. According to the present invention, (a) after the buffer layer is deposited and before the directed thin layer is deposited, under conditions different from the buffer layer deposition conditions, especially at different pressures, temperatures, rates and / or Perpendicular to the substrate surface At an angle of 0 °, at least one cover layer is deposited on the buffer layer. Also disclosed is an apparatus for producing a multilayer material with suitable means for performing the above-described process. |