http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2000504831-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S505-849 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S505-842 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S505-846 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R27-2623 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-82 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R33-10 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R27-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-82 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R33-10 |
| filingDate | 1997-02-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2000-04-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2000504831-A |
| titleOfInvention | Microscope and inspection method |
| abstract | (57) [Abstract] Physical characteristics of an object equipped with a thin and hard substrate or a transparent window provided on the outer wall of the vacuum space of Dewar and a low temperature sensor provided very close to the window in the vacuum space Is a cryomicroscope used for microscopic inspection by a computer. With this configuration, the inspection target can be placed outside the vacuum space at room temperature or higher, and the physical characteristics of the target can be scanned by scanning the surface of the target and displaying the output of the low-temperature sensor on a microscope. Can be inspected. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005503564-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016014541-A |
| priorityDate | 1996-02-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 22.