abstract |
(57) [Problem] To form a perovskite-type oxide thin film having a uniform surface morphology and excellent electrical property homogeneity using a raw material solution for forming a perovskite-type oxide thin film without using an ethylene glycol derivative. I do. A raw material solution for forming a perovskite-type oxide thin film containing Ti and / or Zr, comprising a metal compound containing each component metal or two or more component metals, a partial hydrolyzate thereof, or a partial hydrolyzate thereof In a raw material solution composed of a solution containing a partial polycondensate in an organic solvent, 1-butanol, 2-butanol, 2-methyl-1 -A raw material solution for forming a perovskite-type oxide thin film, comprising one or more butanol solvents selected from the group consisting of propanol and 2-methyl-2-propanol. |