| abstract |
(57) [PROBLEMS] To provide a device inside inspection device and a device inside inspection method which can accurately measure minute defects due to laser deterioration. SOLUTION: A laser light source 1 outputs a laser beam 8 having a wavelength and an intensity capable of generating a minute defect inside a device under test 2. The laser beam 8 is applied to the device under test 2 To generate defects therein. At the same time, the generated defect is illuminated by the same laser light 8, from which scattered light and light emission are generated. This scattered light The light emission is captured by the video camera 5 as an image. After all, the laser beam 8 plays a role of damaging the device under test 2 to generate or grow a defect to increase the scattering intensity or the like therein, and at the same time as illuminating light for illuminating the generated or grown defect. Also works. As a result, it becomes possible to observe the deterioration phenomenon of the device under test 2 due to the laser light in real time. |