| abstract |
(57) [Summary] [PROBLEMS] To provide a flexible sensor having a very flexible sensing surface and having excellent sensitivity and responsiveness to a minute pressure change. A resin film has a thickness of 100 to 100 on one surface. The piezoelectric laminate 2 is formed by depositing a 20,000 ° titanium thin film 18 by vapor deposition, forming a 0.5 to 50 μm thick piezoelectric crystal thin film 19 on the titanium thin film 18, and further forming an electrode layer 20 thereon. ing. |