http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2000330296-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8fb9f44db08d1c42a53f3d28eaae416f |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08K5-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L71-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08K5-09 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08K3-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08K3-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08K3-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08K3-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08K3-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-32 |
| filingDate | 1999-05-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2d34f574db9a44ace024aeb6da3772a5 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c0965d10ad06cd7e32c474d43e0c7b3f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0005f1dface87554843184b5d2c9d508 |
| publicationDate | 2000-11-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2000330296-A |
| titleOfInvention | Developer for resist |
| abstract | (57) [Summary] Even in a fine resist pattern, it is excellent in dissolution selectivity that promotes solubility in a dissolution part and suppresses solubility in a non-dissolution part, and has a shorter time. To provide a developing solution for a resist which can be developed by the method. A basic compound A and an organic compound B having a hydrazino group optionally having an alkyl group or a hydrazino group optionally having a saturated hydrocarbon group, an aromatic ring and a carboxyl group in a molecule. And / or a resist developing solution prepared from a salt C formed from a basic compound A and an organic compound B, and / or a basic compound A having an alkyl group. Resist developer containing a salt C formed from a hydrazino group optionally having an amino group or an alkyl group, an organic compound B having an aromatic ring and a carboxyl group in the molecule . |
| priorityDate | 1999-05-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 178.