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filingDate 1999-04-14-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1c7e5c7770d7452092c36e9c253d6326
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publicationDate 2000-10-24-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2000297365-A
titleOfInvention AlTi-based alloy sputtering target, wear-resistant AlTi-based alloy hard coating, and method of forming the same
abstract PROBLEM TO BE SOLVED: To improve the hardness (abrasion resistance), oxidation resistance, adhesion to a base material, etc. of a film formed on a cutting tool, a sliding member, a metal working tool, etc., and to balance it. It has stable properties and forms a stable film and improves the life of tools and the like on which the film is formed. An Al x Ti 1-x-y -z M y R z ( where, M is Si, Cr, W, 1 or more elements selected from Mo, R is Y, Ce, La, misch metal, etc. , At least one element selected from the group consisting of rare earth elements of 0.05 ≦ x ≦ 0. 7, 0.02 ≦ y ≦ 0.25, 0.0005 ≦ z ≦ 0. 05), and a wear-resistant AlTi-based alloy hard coating having the same composition.
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Total number of triples: 75.