http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2000284020-A
Outgoing Links
Predicate | Object |
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assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_73ebc284a55d5daf0e209d6186c9e65c |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-073 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01R33-76 |
filingDate | 1999-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9aa7b5e416e099bc75761f397c1e376a |
publicationDate | 2000-10-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-2000284020-A |
titleOfInvention | Socket for semiconductor device inspection equipment |
abstract | (57) Abstract: An object of the present invention is to provide a socket for a semiconductor device inspection device capable of accurately detecting and controlling the temperature of a chip portion of a semiconductor device. SOLUTION: A cavity 1 for housing a semiconductor device 16 is provided. 1a, an end portion 16a connected to a chip portion of the semiconductor device 16 housed in the cavity by a member having high thermal conductivity, and an end portion 16a provided corresponding to the end portion. And a contact portion 12. The socket for semiconductor device measurement, comprising: a passage 11b provided so that a fluid medium is in contact with at least a part of the contact portion; The semiconductor device inspection device socket 10 is provided with a temperature detection unit 13 so as to detect a temperature of a contact portion that contacts the semiconductor device inspection device. |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8471576-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2008123608-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8096840-B2 |
priorityDate | 1999-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Predicate | Subject |
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isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426105758 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11643 |
Total number of triples: 17.