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inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dcf2dc25b1c5018717ab03d09f8b1028
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publicationDate 2000-09-29-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2000269163-A
titleOfInvention Method for forming metal film and method for forming wiring
abstract [PROBLEMS] To provide a method capable of selectively forming a metal (or metal compound) film without patterning by etching, and a method of forming a wiring using the method are desired. SOLUTION: A mask 3 having an opening 2 for exposing the surface of the base layer 1 is formed on the base layer 1, and the mask 3 is selected on the surface of the base layer 1 exposed in the opening 2 of the mask 3 by a catalytic CVD method. Metal or metal compound is deposited on the metal film 4 Forming a metal film. Also, a method for forming a wiring using the method for forming a metal film.
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