| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6b7947c26de6ffc9e68cec72b1f38479 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate |
1999-03-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_468d0f7ab206666922dc1c0d4165e779
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aa1aea87e0fc5240268cbde8e6897918
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2b9fdc2dca9d5583dbbd26d033c28c99 |
| publicationDate |
2000-09-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2000250231-A |
| titleOfInvention |
Photoresist stripper composition and method of using same |
| abstract |
(57) Abstract: In a mixed solvent of an alkylamine or an alkanolamine, a polar organic solvent and water, an alkylamine or an alkanolamine represented by at least one of the general formulas 1 to 4 and boric acid A photoresist stripping composition comprising a salt of Embedded image Embedded image Embedded image Embedded image [Effect] A high peeling force is obtained by increasing the alkalinity, and corrosion of the Al wiring can be suppressed without lowering the peeling force even under a high alkali condition by adding a borate. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100988679-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20110130563-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007536565-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007536566-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109976109-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014142635-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2002162755-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101691850-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2002241795-A |
| priorityDate |
1999-03-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |