| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_eb2648e65ad8850515bd727a122f1186 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T137-3124
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T137-0396
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T137-3127 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B67D7-78
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/E03C1-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B67D7-0272
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B67D7-0283
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/E03C1-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B67D7-02 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B67D7-78
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B67D7-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F17D1-08 |
| filingDate |
2000-02-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f5190276b4b8070e5263283ab59437dd |
| publicationDate |
2000-09-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2000249299-A |
| titleOfInvention |
Liquid delivery system for ultrapure liquid delivery and use thereof |
| abstract |
(57) [Summary] The liquid to be delivered leaves the container (3A, 3B) maintained at the overpressure P1, from which the planned intermediate pressure P2> P It is transferred to the intermediate storage tank (11) maintained at 1. A plurality of small-volume delivery containers (12A, 12B) are connected in parallel downstream of this tank, each of which has a delivery pressure P3> Pressure can be applied to P2 or filling pressure P4 <P2. Applies to the delivery of ultra pure chemical products intended for the microelectronics industry. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100668392-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007311603-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4697882-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11603306-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2021528568-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019520192-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7139467-B2 |
| priorityDate |
1999-02-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |