| abstract |
(57) [Summary] [PROBLEMS] To eliminate or reduce thermal deformation of an original plate. SOLUTION: In an exposure apparatus for illuminating a pattern on an original plate 3 and exposing the object to be exposed directly or via a projection optical system, blowing means 2, 4 and 5 for blowing a gas or a gas whose temperature is controlled to the original plate. , 7 and control means for controlling any one or more of the blowing amount, the blowing position, and the blowing direction of the gas or the temperature-controlled gas. Or A member that holds the original plate by sending a fluid or a temperature-controlled fluid to the surface of the member that holds the original plate, a unit that has a mechanism that holds the original plate, or a piping section provided around the original plate, and a mechanism that holds the original plate And cooling means for cooling the periphery of the unit or the original plate having the above. Alternatively, a refrigerant circulation circuit that circulates around the original plate and uses a low-boiling-point refrigerant as a working medium is provided, and a decompression mechanism is connected to the refrigerant circulation circuit. |