http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2000243601-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_be055db3c1a09879df07379ba969e223 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01C7-00 |
| filingDate | 1999-02-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fec9cc2717abea12c5e9624d591f60eb |
| publicationDate | 2000-09-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2000243601-A |
| titleOfInvention | Method for producing metal oxide film |
| abstract | (57) [Problem] To provide a method of manufacturing a metal oxide film capable of suppressing variations in resistance value and temperature coefficient of resistance of the metal oxide film. SOLUTION: A first resistor solution 11 containing tin chloride, A second resistor solution 12 containing one chloride selected from antimony, iron, vanadium, chromium, nickel, molybdenum, manganese, copper, zinc, bismuth, cobalt, and indium having different boiling points from the tin chloride; Each is vaporized or sprayed separately to form a metal oxide film on the substrate surface. |
| priorityDate | 1999-02-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 44.