http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2000243160-A
Outgoing Links
Predicate | Object |
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assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1374dd16777534b65ad4422333245af8 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01B13-00 |
filingDate | 1999-02-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_afff40d47fd6039b98e1aef662df9919 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0d6d81198dd083d60fe526923e0013bc |
publicationDate | 2000-09-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-2000243160-A |
titleOfInvention | Method for producing transparent conductive laminate |
abstract | (57) [Problem] To provide a current transparent conductive film with a heat treatment within a range not exceeding the glass transition temperature of the polymer substrate and the resistance immediately after the formation of the conductive film in order to improve productivity. An object of the present invention is to provide a transparent conductive film having a low specific resistance with little change in resistance between them. SOLUTION: A transparent conductive film is formed on a polymer substrate by sputtering using a target containing In-Zn-O as a main component and a transparent conductive film mainly containing indium oxide and containing 4 to 25% by weight of zinc oxide. A method for producing a conductive laminate, wherein a ratio of an oxygen partial pressure to a water pressure is 10 to 100. 0 and the ratio of water pressure to inert gas is 1. In the range of 3 × 10 −5 to 2.5 × 10 −4 and at 80 ° C. A method for producing a transparent conductive laminate, comprising forming a transparent conductive film on a polymer substrate in an atmosphere maintained at a temperature of less than. |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014067701-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008218143-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008216541-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018150613-A |
priorityDate | 1999-02-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 32.