http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2000221685-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_03d0f52bb4069f8a19d70dcfb697c67a |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-075 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L83-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 1999-01-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2cb048b86304949d908d7c33ed66073c |
| publicationDate | 2000-08-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2000221685-A |
| titleOfInvention | Positive silicone-containing photosensitive composition |
| abstract | PROBLEM TO BE SOLVED: To provide a photosensitive composition having a small light absorption in a Deep-UV region and capable of responding to a short-wavelength light source, specifically having a high sensitivity and a high resolution, Further, it is another object of the present invention to provide a photosensitive composition which gives a rectangular shape with little film loss after development processing, particularly in a fine pattern of 0.2 μm or less. It is another object of the present invention to provide a photosensitive composition which has a small dimensional shift (dimension fluctuation) when transferring a pattern to a lower layer in an oxygen plasma process and has excellent dimensional reproducibility. A silicon-containing polymer having a repeating unit having a specific structure, insoluble in water and soluble in alkali, a compound capable of generating an acid upon irradiation with actinic rays or radiation, and having a specific structure in a side chain A positive silicone-containing photosensitive composition containing a polymer having a repeating unit containing a group and having a property of increasing the solubility in an alkaline developer by the action of an acid. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007086528-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4568668-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2008111251-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2008111203-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7177072-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8652751-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007304545-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6998223-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-5110077-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7297461-B2 |
| priorityDate | 1999-01-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 250.