http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2000218668-A

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classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C45-62
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-68
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-673
filingDate 1999-02-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ed50006de0f841ff1fec15c608348534
publicationDate 2000-08-08-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2000218668-A
titleOfInvention Manufacturing method of jig for semiconductor transportation
abstract PROBLEM TO BE SOLVED: To prevent impurities from leaking out onto the surface of a jig for semiconductor transfer and generation of volatile gas when heat-treating the jig for semiconductor transfer, and do not hinder the surface contamination of a semiconductor product such as a silicon wafer. A semiconductor transfer jig is provided using a vent-type injection molding machine having a vent hole for discharging a gas component generated from a molten thermoplastic resin in a heating cylinder. A method of manufacturing a jig for transporting semiconductors, comprising:
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2004217898-A
priorityDate 1999-02-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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