http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2000216093-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_00823c653968e3a68b83716db4a4e010 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 |
| filingDate | 1999-01-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_16d8562bf31fefd5fc1a015095b548e9 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a63bbabec663150573d4e62603c51001 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8e11014b13d01ab24213f52b00060697 |
| publicationDate | 2000-08-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2000216093-A |
| titleOfInvention | Method and apparatus for removing fumes from exhaust gas |
| abstract | (57) [Problem] To provide a method and an apparatus capable of reliably removing fume by a simple operation. SOLUTION: In treating fumes generated when a special material gas such as silane gas, arsine gas, and phosphine gas is heat-treated by a heat treatment type abatement device (1), combustion exhaust gas derived from the heat treatment type abatement device (1). The fumes are cooled by applying steam to the water, and fumes are removed by utilizing the condensation action of the steam. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101373314-B1 |
| priorityDate | 1999-01-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 31.