| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_696ca0ae93d5cf5a686273601361781f |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate |
1999-01-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e54f6e2dd1cd969a2038d7521dd360f8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a9581686b6f8593f07d39816ba26c9ea
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2b75b6a715667a5d8f9357e66f3c2157 |
| publicationDate |
2000-07-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2000208467-A |
| titleOfInvention |
Semiconductor substrate cleaning liquid and semiconductor substrate cleaning method using the same |
| abstract |
(57) [Problem] To provide a semiconductor substrate cleaning liquid capable of removing metal contamination and particles without causing unevenness due to melting of a material on a semiconductor substrate surface after chemical mechanical polishing. The method is used after chemical mechanical polishing of a semiconductor substrate. Further, it is a semiconductor substrate cleaning liquid comprising a fluorine-containing compound and a water-soluble or water-miscible organic solvent. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4498424-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2018030006-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2004253696-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008219009-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018024745-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007503115-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008277718-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8128755-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10876073-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4499365-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7928046-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110813891-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008541426-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8158569-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100989542-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100634401-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-0219406-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006179593-A |
| priorityDate |
1999-01-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |