http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2000208043-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0950e9df7f0e1b73efee1bda859951ad |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J9-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-00 |
| filingDate | 1999-01-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e89960ac8bea0482925d80aaf00c9fbe http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9b2a041af27327763b762729da043f91 |
| publicationDate | 2000-07-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2000208043-A |
| titleOfInvention | Hard mask for shadow mask |
| abstract | [PROBLEMS] To provide a hard mask for a shadow mask which has sufficient film strength, can eliminate poor vacuum adhesion at the time of exposure, and can improve the production yield and productivity of shadow masks as a result. The purpose is to provide. A hard mask for a shadow mask according to the present invention has a pattern in which a portion corresponding to an opening portion of a shadow mask on an ultraviolet-transparent blue plate glass 11 has a protruding pattern. The upper layer has silicone particles 14a of 3 to 5 μm in size. And a gelatin layer 14b containing When the fine particle-containing gelatin layer is formed, the thickness of the dried fine particle is smaller than the particle size of the fine particles, so that the silicone fine particles project from the outer surface of the gelatin layer 13a. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100429635-B1 |
| priorityDate | 1999-01-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 27.