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classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
filingDate 1999-01-07-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_757f8711d3b59c4a88a269e18468cfe7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_23c43aa3fe55d690d955960d87a560cc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e9da8ff6776a95c7ef10b2b92fadd34a
publicationDate 2000-07-18-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2000199971-A
titleOfInvention Photo-resist stripping composition and photo-resist stripping method using the same
abstract (57) [Problem] To provide excellent peelability to both a photoresist film and a deteriorated film, and to form a metal film, especially a substrate on which Al or an Al alloy is formed, even under high-temperature processing conditions, or Provided is a photoresist stripper composition capable of effectively preventing corrosion of both substrates on which Ti is formed, and a photoresist stripping method using the same. SOLUTION: (a) 2 to 30% by weight of hydroxylamines, (b) 2 to 35% by weight of water, (c) 25 to 40% by weight of monoethanolamine and / or 2- (2-aminoethoxy) ethanol, (D) 20 to 32% by weight of N-methyl-2-pyrrolidone and / or diethylene glycol monobutyl ether, and (e) 2 to 20% by weight of an aromatic hydroxy compound, a photoresist stripping composition, and a photoresist using the same Peeling method.
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