| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7820eb060b017f856ba2ce4646fb12c4 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
| filingDate |
1998-12-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f5f613ad65cc58c14aa4b8a4fa028709
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f4a6231ec3aa143de4543ddc78f4f1df
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f99d9858e1d1824a73f16828bc142838 |
| publicationDate |
2000-06-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2000174080-A |
| titleOfInvention |
Prober stylus cleaning mechanism |
| abstract |
(57) [Summary] [PROBLEMS] To collect dust and the like removed from a stylus without scattering into a prober, to clean the prober and not to affect the measurement of a wafer under inspection. A probe cleaning mechanism of a prober according to the present invention includes a cleaning stage for cleaning a probe. A suction passage 14 is provided around the cleaning portions 17 and 18, and dust and the like removed from the stylus are collected through the passage. The cleaning portion is formed by an alumina ceramic plate or other abrasive sheet, brush or the like. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007165697-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/GB-2389303-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/GB-2389303-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009156696-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6813804-B2 |
| priorityDate |
1998-12-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |