| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_73ebc284a55d5daf0e209d6186c9e65c |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-083
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-187
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J2-045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-318
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-317
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J2-055
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J2-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J2-135
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J2-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J2-145
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J2-15 |
| filingDate |
1998-11-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f44a11946c40c0d75041932d39ac51d8 |
| publicationDate |
2000-06-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2000164947-A |
| titleOfInvention |
Piezoelectric thin film element |
| abstract |
(57) [Problem] To provide a piezoelectric thin film element provided with a single antiferroelectric film. SOLUTION: The piezoelectric thin film element according to the present invention is a piezoelectric thin film element including an antiferroelectric film 16 sandwiched between an upper electrode 17 and a lower electrode 14, wherein the lower electrode 14 and the antiferroelectric film 16 are provided. Between PbZr x Ti 1-x O 3 (0.5 ≦ x ≦ 0.7) is provided. Even if a single (not containing titanium) antiferroelectric film 16 is formed on the adhesion layer 15, the antiferroelectric film 16 Does not separate from the adhesion layer 15. In addition, adhesion layer 1 Since the crystal structure of No. 5 has consistency with the crystal structure of the antiferroelectric film 16, it has excellent characteristics as the adhesion layer 15. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2002043641-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6362558-B1 |
| priorityDate |
1998-11-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |