http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2000147770-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6c8d4dc7bd1a30d8fda907fceaeb4e69 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 |
| filingDate | 1998-11-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d6a6ba714d1a218f4470e9ac84cf1427 |
| publicationDate | 2000-05-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2000147770-A |
| titleOfInvention | Positive radiation-sensitive resin composition |
| abstract | (57) [Problem] To provide a positive-type radiation-sensitive resin composition having excellent sensitivity and resolution and good environmental resistance. SOLUTION: (A) A phenolic hydroxyl group-containing alkali-soluble resin or a resin in which at least a part of the hydroxyl group is protected by an acid-decomposable protecting group, and (B) a group which is decomposed by the action of an acid to impart alkali solubility. In a positive radiation-sensitive resin composition containing a compound having a partial structure which can be formed and (C) a compound which is decomposed by actinic rays or radiation to generate an acid, the component (B) imparts alkali solubility. A positive-working radiation-sensitive resin composition comprising an alkyl carbonate group having 7 or more carbon atoms which may be substituted as a partial structure capable of forming a group having the same structure. |
| priorityDate | 1998-11-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 223.