http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2000133650-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_49a2dbb0162367b8eb8e27fdf19d0564 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02258 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02238 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-78 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-78 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-301 |
| filingDate | 1999-10-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9b8147aacc3757c0706d806170e13395 |
| publicationDate | 2000-05-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2000133650-A |
| titleOfInvention | Method for the production of semiconductor chips |
| abstract | PROBLEM TO BE SOLVED: To provide a method of the type mentioned at the outset which enables a simple manufacture of a semiconductor chip. Furthermore, it is necessary to avoid damaging the structures required for the function of the semiconductor chip when applying the insulating layer to the side walls of the semiconductor chip. The object of the present invention is to provide a wafer with a structure required for the function of a semiconductor chip, and thereafter, at least in each region, at a boundary region of the semiconductor chip, a side wall of the semiconductor chip is exposed. The problem is solved by providing an electrical insulating layer on the side wall of the substrate and forming the electrical insulating layer by anodic oxidation of the side wall. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015216298-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006261514-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009252998-A |
| priorityDate | 1998-10-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 28.