http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2000111703-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1c3026bd5177f1c397fc6c388925ddf3 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B1-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B1-115 |
| filingDate | 1998-10-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3ec3a3d36f712ebb348d449cf10b1eb5 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_84f8d543d05753fbe2aa23ee685e8335 |
| publicationDate | 2000-04-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2000111703-A |
| titleOfInvention | Anti-reflective coating |
| abstract | (57) Abstract: Provided is an antireflection film having a low reflectance of S-polarized light. SOLUTION: In a five-layer antireflection film in which first, second, third, fourth and fifth layers of thin films are laminated in order from the substrate side, first, second, third, fourth and fourth layers are formed. The refractive index and thickness of the fifth layer are n1, n2, n3, n4, n5 and d1, d2. When d3, d4, and d5 are set and the design dominant wavelength is λ0, n2 or n3 is 1.56 or less, and n4 ≧ n2> n1 ≧ n5, n2> n3, 0 <n1d1 ≦ 0. 06λ0 or 0.20 ≦ n1d1 ≦ 1.25λ0, 0.03λ0 ≦ n2d2 ≦ 0.15λ0, 0.02λ0 ≦ n3d3 ≦ 0.19λ0, 0.09λ0 ≦ n4d4 ≦ 1.30λ0,0.24λ0 ≦ n5d5 ≦ 0.36λ0 In a relationship. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2003248103-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005302088-A |
| priorityDate | 1998-10-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 22.