http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2000109987-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fc6220b93fae4be14ada49e4ecc1860b |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-06 |
| filingDate | 1998-10-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a88eea617dc88b91083039d59475c32c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bfface2eea32ddd82c21e637c5f3b3a9 |
| publicationDate | 2000-04-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2000109987-A |
| titleOfInvention | New composition |
| abstract | (57) [Summary] [Problem] It has good wettability and low foam property with respect to a chromium material having a pattern formed on the surface with a resist material, In addition, the present invention provides a chromium etchant composition having an excellent etching effect and an etching method using the same. A composition comprising a ceric salt, an acid, an adhesion tension enhancer, and an alkylsulfonic acid compound, and an etching method using the same. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008115362-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009105341-A |
| priorityDate | 1998-10-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 167.