http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2000104171-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6b822ee046eb6c45d1e3bd9ce9c1782e |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G11B5-84 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-27 |
| filingDate | 1999-10-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_26c57c529e4d2020c5a0aba167e94809 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_21747acfb77b0d181ab4dff0d66658d4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bd3bbf5d40bda51cff406356ca0c7b66 |
| publicationDate | 2000-04-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2000104171-A |
| titleOfInvention | Coating method |
| abstract | (57) Abstract: To protect a recording medium such as an optical disk or a magnetic tape, a DLC (diamond-like carbon) film is formed on a surface thereof by a CVD method. A high-density plasma is formed at a pressure of 15 to 100 Torr and an electrode interval of 6 mm or less, and an ion sheath is formed on the anode side. Then, a DLC film is formed using ion bombardment. During the film formation, the film is formed while applying ultrasonic vibration to the substrate. As a result, the number of pinholes in the DLC film can be reduced to 30 / mm 2 . |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2002031893-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20030055952-A |
| priorityDate | 1993-07-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 23.