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publicationDate 2000-04-07-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2000101187-A
titleOfInvention Method for manufacturing optical semiconductor device
abstract PROBLEM TO BE SOLVED: To provide a method for manufacturing an optical semiconductor device in which elements having different operation wavelengths are collectively formed on a circular semiconductor substrate, and to efficiently and uniformly keep the number of elements per operation wavelength obtained from one substrate. In addition, the operation characteristics are made highly uniform. SOLUTION: In a method of manufacturing an optical semiconductor device in which elements having different operating wavelengths are collectively formed on a circular semiconductor substrate, the operating wavelength of the optical semiconductor device is quadratically changed from the center of the substrate toward the outer periphery of the substrate. .
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http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007053381-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010239056-A
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