http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2000091233-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 |
| filingDate | 1998-09-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6b5b6fe0e0ef5d675109530473429d05 |
| publicationDate | 2000-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2000091233-A |
| titleOfInvention | Semiconductor manufacturing equipment |
| abstract | PROBLEM TO BE SOLVED: To suppress the deformation of a filament without increasing the number of supports to extend the life of a halogen lamp, and to improve the performance of a semiconductor manufacturing apparatus such as an epitaxial growth apparatus using the halogen lamp. . The present invention relates to an epitaxial growth apparatus (10). And the like, a support 26 for supporting the filament 24 of the halogen lamp 20 includes a support rod 48 having one end fixed to the sealing body 22 and the other end extending to a position adjacent to the support point, and one end being other than the support rod 48. And a support wire 50 fixed to one end and connected to the filament 24 at the other end at the support point, wherein the support wire is lower in rigidity than the support rod. The support of the filament is mainly performed by a rigid support rod, and the connection with the filament is performed by a less rigid support wire. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105518822-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6613638-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6858508-B2 |
| priorityDate | 1998-09-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 19.