http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2000091205-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_80787665b837ed3eb503bbcd27c0043a |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-22 |
| filingDate | 1998-09-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_04a0fcc0f2a1121144d23ce631334039 |
| publicationDate | 2000-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2000091205-A |
| titleOfInvention | Exposure light source, exposure apparatus, and method of manufacturing semiconductor device |
| abstract | (57) [Summary] [PROBLEMS] To generate short wavelength / high power exposure light at low running cost. SOLUTION: An exposure light source 100 includes a dye laser oscillator 102 and a dye laser amplifier 103 excited by a XeCl excimer laser 101, and three wavelength converters 104. a, 104b and 104c. Laser light L having a wavelength of 440 nm extracted from the dye laser oscillator 102 1 is amplified by the dye laser amplifier 103 and becomes a high-power laser beam L3. The laser beam L3 is applied to the beam splitter 1 The laser beam L4 is branched into laser beams L4 and L7 at 15c. Is incident on the wavelength converter 104a to generate ultraviolet light having a wavelength of 220 nm as the second harmonic, and the laser beam L7 is incident on the wavelength converter 104b, and the wavelength 159 is generated by the OPO. An infrared light L9 of 0 nm is generated. The ultraviolet light L6 and the infrared light L9 are combined by the dichroic mirror 117b, incident on the wavelength converter 104c and subjected to SFM, and the wavelength 193 The exposure light L12 of nm is generated. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102126811-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112771444-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007113992-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112771444-B |
| priorityDate | 1998-09-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 27.